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Introduction to Microlithography - Second Edition
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Introduction to Microlithography - Second Edition
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    所在地：Rio Rancho, New Mexico, 美國
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    Subject Area
    Microlithography
    Educational Level
    Adult & Further Education
    Personalized
    No
    Level
    Beginner, Intermediate
    Country/Region of Manufacture
    United States
    Subject
    Microlithography
    ISBN
    9780841228481

    關於產品

    Product Identifiers

    Publisher
    American Chemical Society
    ISBN-10
    0841228485
    ISBN-13
    9780841228481
    eBay Product ID (ePID)
    938058

    Product Key Features

    Number of Pages
    540 Pages
    Language
    English
    Publication Name
    Introduction to Microlithography
    Subject
    Electronics / Semiconductors, Chemistry / Physical & Theoretical, Chemistry / Organic, Industrial Technology
    Publication Year
    1994
    Features
    Revised
    Type
    Textbook
    Subject Area
    Technology & Engineering, Science
    Author
    C. Grant Willson
    Series
    Acs Professional Reference Book Ser.
    Format
    Hardcover

    Dimensions

    Item Height
    1.4 in
    Item Weight
    30.5 Oz
    Item Length
    9.1 in
    Item Width
    6.2 in

    Additional Product Features

    Edition Number
    2
    Intended Audience
    College Audience
    LCCN
    93-042023
    Dewey Edition
    20
    Dewey Decimal
    621.3815/31
    Edition Description
    Revised edition
    Table Of Content
    L.F. Thompson: An Introduction to LithographyM.J. Bowden: The Lithographic Process: The PhysicsC.G. Willson: Organic Resist MaterialsL.F. Thompson: Resist ProcessingJ.A. Mucha, D.W. Hess, and E.S. Aydil: Plasma Etching
    Synopsis
    Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography., Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also proveinvaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography., Updated and expanded Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.
    LC Classification Number
    TR940.I57 1994

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