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Handbook of Ion Beam Processing Technology: Principles, Deposition, Film Mod...

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Release Year
1990
Book Title
Handbook of Ion Beam Processing Technology: Principles, Deposi...
ISBN
9780815511991
Subject Area
Technology & Engineering, Science
Publication Name
Handbook of Ion Beam Processing Technology : Principles, Deposition, Film Modification and Synthesis
Item Length
9 in
Publisher
Elsevier Science & Technology Books
Subject
Materials Science / General, Physics / Quantum Theory, Chemistry / Physical & Theoretical, Metallurgy, Physics / Nuclear
Publication Year
1989
Type
Textbook
Format
Hardcover
Language
English
Author
Stephen M. Rossnagel, Jerome J. Cuomo, Harold R. Kaufman
Item Width
6 in
Item Weight
34.4 Oz
Number of Pages
456 Pages

關於產品

Product Information

Deals with ion beam processing for basic sputter etching of samples, sputter deposition of thin films, the synthesis of material in thin film form, and the modification of the properties of thin films.

Product Identifiers

Publisher
Elsevier Science & Technology Books
ISBN-10
081551199x
ISBN-13
9780815511991
eBay Product ID (ePID)
23038847434

Product Key Features

Author
Stephen M. Rossnagel, Jerome J. Cuomo, Harold R. Kaufman
Publication Name
Handbook of Ion Beam Processing Technology : Principles, Deposition, Film Modification and Synthesis
Format
Hardcover
Language
English
Subject
Materials Science / General, Physics / Quantum Theory, Chemistry / Physical & Theoretical, Metallurgy, Physics / Nuclear
Publication Year
1989
Type
Textbook
Subject Area
Technology & Engineering, Science
Number of Pages
456 Pages

Dimensions

Item Length
9 in
Item Width
6 in
Item Weight
34.4 Oz

Additional Product Features

LCCN
88-038244
Intended Audience
Scholarly & Professional
Lc Classification Number
Qc702.7.I55h36 1989
Table of Content
Perspective on Past, Present and Future Uses of Ion Beam TechnologyPart I. Ion Beam TechnologyGridded Broad-beam Ion SourcesECR Ion SourcesHall Effect Ion SourcesIonized Cluster Beam (ICB) Deposition and EpitaxyPart II. Sputtering PhenomenaQuantitative SputteringLaser-induced Fluorescence as a Tool for the Study of Ion Beam SputteringCharacterization of Atoms Desorbed from Surfaces by Ion Bombardment Using Multiphoton Ionization DetectionPart III. Film Modification and SynthesisThe Modification of Films by Ion BombardmentControl of Film Properties by Ion-assisted Deposition Using Broad Beam SourcesEtching with Directed BeamsFilm Growth Modification by Concurrent Ion Bombardment: Theory and SimulationInterface Structure and Thin Film AdhesionModification of Thin Films by Off-normal Incidence Ion BombardmentIon Beam Interactions with Polymer SurfacesTopography: Texturing EffectsMethods and Techniques of Ion Beam ProcessesIon-assisted Dielectric and Optical CoatingsDiamond and Diamond-like Thin Films by Ion Beam TechniquesIndex
Copyright Date
1989
Dewey Decimal
621.381/7
Dewey Edition
19
Illustrated
Yes

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